Inventor · disambiguated record
Scott A. Chalmers
Also filed as: CHALMERS SCOTT A · CHALMERS SCOTT ARLEN
19 granted patents·8 pending applications·634 citations·filing 1990–2018
94Inventor score
Top patents by PatentIndex Score
27 records- 0196US6204922B1Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sampleFILMETRICS INC·Filed 1998·Granted Mar 20, 2001·216 cites·21 claims
- 0295US6172756B1Rapid and accurate end point detection in a noisy environmentFILMETRICS INC·Filed 1998·Granted Jan 9, 2001·188 cites·15 claims
- 0394US7151609B2Determining wafer orientation in spectral imagingFILMETRICS INC·Filed 2006·Granted Dec 19, 2006·30 cites·37 claims
- 0482US10948284B1Optical profilometer with color outputsCHALMERS SCOTT A·Filed 2018·Granted Mar 16, 2021·4 cites·75 claims
- 0582US6184985B1Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sourcesFILMETRICS INC·Filed 1998·Granted Feb 6, 2001·68 cites·20 claims
- 0678US6075588AIntegrated multi-channel optical-based flux monitor and methodUNIV CALIFORNIA·Filed 1996·Granted Jun 13, 2000·54 cites·58 claims
- 0777US7502119B2Thin-film metrology using spectral reflectance with an intermediate in-line referenceFILMETRICS INC·Filed 2007·Granted Mar 10, 2009·5 cites·26 claims
- 0876US7095511B2Method and apparatus for high-speed thickness mapping of patterned thin filmsFILMETRICS INC·Filed 2001·Granted Aug 22, 2006·21 cites·17 claims
- 0975US10247605B2Automatic real-time wavelength calibration of fiber-optic-based spectrometersFILMETRICS INC·Filed 2013·Granted Apr 2, 2019·3 cites·87 claims
- 1066US9019484B2Combining normal-incidence reflectance and transmittance with non-normal-incidence reflectance for model-free characterization of single-layer filmsCHALMERS SCOTT A·Filed 2011·Granted Apr 28, 2015·1 cites·70 claims
- 1162US8908177B2Correction of second-order diffraction effects in fiber-optic-based spectrometersFILMETRICS INC·Filed 2013·Granted Dec 9, 2014·1 cites·31 claims
- 1256US10571615B2High-lifetime broadband light source for low-power applicationsFILMETRICS INC·Filed 2016·Granted Feb 25, 2020·0 cites·62 claims
- 1351US5397739AMethod for accurate growth of vertical-cavity surface-emitting lasersSANDIA CORP·Filed 1993·Granted Mar 14, 1995·21 cites·19 claims
- 1449US5379719AMethod of deposition by molecular beam epitaxySANDIA NATIONAL LAB·Filed 1993·Granted Jan 10, 1995·8 cites·21 claims
- 1548US2013265795A1High-lifetime broadband light source for low-power applicationsCHALMERS SCOTT A·Filed 2013·Application pending·0 cites
- 1646US10240981B2Optical spectrometer configuration including spatially variable filter (SVF)ROSS MATTHEW F·Filed 2016·Granted Mar 26, 2019·0 cites·63 claims
- 1745US10724900B2Determining focus condition in spectral reflectance systemFILMETRICS INC·Filed 2016·Granted Jul 28, 2020·0 cites·36 claims
- 1845US5166100AMethods of making nanometer period optical gratingsGOSSARD ARTHUR C·Filed 1990·Granted Nov 24, 1992·14 cites·9 claims
- 1943US10620420B2Optical system for use with microscopeFILMETRICS INC·Filed 2016·Granted Apr 14, 2020·0 cites·21 claims
- 2040US11099068B2Optical instrumentation including a spatially variable filterFILMETRICS INC·Filed 2017·Granted Aug 24, 2021·0 cites·45 claims
- 2140US2005174584A1Method and apparatus for high-speed thickness mapping of patterned thin filmsFiled 2005·Application pending·0 cites
- 2239US2006166608A1Spectral imaging of substratesCHALMERS SCOTT A·Filed 2005·Application pending·0 cites
- 2338US2004259472A1Whole-substrate spectral imaging system for CMPFiled 2004·Application pending·0 cites
- 2437US2005174583A1Method and apparatus for high-speed thickness mapping of patterned thin filmsFiled 2005·Application pending·0 cites
- 2537US2018252518A1Optical profilometerCHALMERS SCOTT A·Filed 2017·Application pending·0 cites
- 2635US2017314914A1Optical profilometerCHALMERS SCOTT A·Filed 2017·Application pending·0 cites
- 2735US2011170097A1Fiber-Based Optical Probe With Decreased Sample-Positioning SensitivityCHALMERS SCOTT A·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →