Inventor · disambiguated record
Scott E. Peitzsch
Also filed as: PEITZSCH SCOTT · PEITZSCH SCOTT E
7 granted patents·17 citations·filing 2006–2021
78Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT3APPLIED MATERIALS INC2VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2
Top patents by PatentIndex Score
7 records- 0192US11670532B1System and method for controlling electrostatic clamping of multiple platens on a spinning diskAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·2 cites·18 claims
- 0286US9108322B2Force sensing system for substrate lifting apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 18, 2015·9 cites·20 claims
- 0367US8004817B2Method of platen fabrication to allow electrode pattern and gas cooling optimizationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·3 cites·16 claims
- 0463US9417280B2System and method for analyzing voltage breakdown in electrostatic chucksVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Aug 16, 2016·1 cites·18 claims
- 0563US7583491B2Electrostatic chuck to limit particle deposits thereonVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Sep 1, 2009·2 cites·4 claims
- 0654US10732615B2System and method for minimizing backside workpiece damageVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Aug 4, 2020·0 cites·18 claims
- 0753US10879038B1Conductive beam optic containing internal heating elementAPPLIED MATERIALS INC·Filed 2019·Granted Dec 29, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →