Inventor · disambiguated record
Senthil Arthanari
Also filed as: ARTHANARI SENTHIL · ARTHANARI SENTHIL K
2 granted patents·36 citations·filing 2001–2007
62Inventor score
Top patents by PatentIndex Score
2 records- 0179US7494893B1Identifying yield-relevant process parameters in integrated circuit device fabrication processesPDF SOLUTIONS INC·Filed 2007·Granted Feb 24, 2009·14 cites·20 claims
- 0272US6559033B1Processing for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal linesLSI LOGIC CORP·Filed 2001·Granted May 6, 2003·22 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →