Inventor · disambiguated record
Seobong Chang
Also filed as: CHANG SEOBONG
6 granted patents·0 citations·filing 2017–2023
67Inventor score
Technology areasH10P
Files withENTEGRIS INC6
Top patents by PatentIndex Score
6 records- 0178US12237170B2Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobaltENTEGRIS INC·Filed 2023·Granted Feb 25, 2025·0 cites·14 claims
- 0269US12037681B2Method for forming carbon rich silicon-containing filmsENTEGRIS INC·Filed 2022·Granted Jul 16, 2024·0 cites·17 claims
- 0365US11804375B2Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobaltENTEGRIS INC·Filed 2020·Granted Oct 31, 2023·0 cites·10 claims
- 0461US11414750B2Method for forming carbon rich silicon-containing filmsENTEGRIS INC·Filed 2020·Granted Aug 16, 2022·0 cites·12 claims
- 0560US12071688B2Precursors and methods for preparing silicon-containing filmsENTEGRIS INC·Filed 2021·Granted Aug 27, 2024·0 cites·15 claims
- 0655US10872770B2Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of cobaltENTEGRIS INC·Filed 2017·Granted Dec 22, 2020·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →