Inventor · disambiguated record
Sena Fujita
Also filed as: FUJITA SENA
4 granted patents·7 pending applications·2 citations·filing 2019–2025
57Inventor score
Files withTOKYO ELECTRON LTD11
Top patents by PatentIndex Score
11 records- 0182US11260433B2Cleaning method of substrate processing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Mar 1, 2022·2 cites·7 claims
- 0260US11915914B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Feb 27, 2024·0 cites·24 claims
- 0360US2025340979A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0457US12252786B2Cleaning method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Mar 18, 2025·0 cites·12 claims
- 0555US2025346997A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0649US11410847B2Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Aug 9, 2022·0 cites·9 claims
- 0749US2024263306A1Film forming method and film forming deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0849US2025347001A1Film formation method and film formation apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0943US2024254617A1Film formation method and film formation deviceTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1042US2020312677A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1138US2019284687A1Cleaning Method and Operating Method of Film-Forming Apparatus, and Film-Forming ApparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →