Inventor · disambiguated record

Sergei Golovkov

Also filed as: GOLOVKOV SERGEI

0 granted patents·3 pending applications·0 citations·filing 2023–2024

Technology areasH10P

Files withASM IP HOLDING BV3

Top patents by PatentIndex Score

3 records

0157US2023298920A1Electrostatic chuck assembly and method of using sameASM IP HOLDING BV·Filed 2023·Application pending·0 cites
0256US2025132131A1Plasma modulation apparatus for substrate processing systemASM IP HOLDING BV·Filed 2024·Application pending·0 cites
0348US2025140540A1Substrate processing system with capabilities for detecting whether a wafer is dechucked and a method thereofASM IP HOLDING BV·Filed 2024·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →