Inventor · disambiguated record
Seiichi Kaise
Also filed as: KAISE SEIICHI
12 granted patents·6 pending applications·50 citations·filing 2002–2023
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
18 records- 0187US9305817B2Method for purging a substrate containerTOKYO ELECTRON LTD·Filed 2013·Granted Apr 5, 2016·13 cites·11 claims
- 0286US11735448B2Container, container partition plate, substrate processing system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2020·Granted Aug 22, 2023·2 cites·10 claims
- 0385US7245987B2Cluster tool and transfer control methodTOKYO ELECTRON LTD·Filed 2005·Granted Jul 17, 2007·11 cites·4 claims
- 0481US8475623B2Substrate processing method, system and programKAISE SEIICHI·Filed 2012·Granted Jul 2, 2013·5 cites·2 claims
- 0579US11631607B2Carrier and jigTOKYO ELECTRON LTD·Filed 2020·Granted Apr 18, 2023·1 cites·19 claims
- 0668US10010913B2Purging apparatus and purging method for substrate storage containerTOKYO ELECTRON LTD·Filed 2013·Granted Jul 3, 2018·3 cites·9 claims
- 0768US8257601B2Substrate processing method, system and programKAISE SEIICHI·Filed 2011·Granted Sep 4, 2012·2 cites·1 claims
- 0867US2023290660A1Container, container partition plate, substrate processing system, and substrate transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0965US6970770B2Cluster tool and method for controlling transportTOKYO ELECTRON LTD·Filed 2002·Granted Nov 29, 2005·11 cites·10 claims
- 1064US7854821B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2006·Granted Dec 21, 2010·2 cites·8 claims
- 1158US2024182252A1Transfer module and transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1256US2024186158A1Transfer module and transfer methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1356US2024030011A1Substrate transfer system and transfer moduleTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1449US2006090703A1Substrate processing method, system and programTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1548US12285786B2Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning methodTOKYO ELECTRON LTD·Filed 2021·Granted Apr 29, 2025·0 cites·20 claims
- 1648US8859046B2Substrate processing apparatus, control method adopted in substrate processing apparatus and programNAKAMURA HIROSHI·Filed 2011·Granted Oct 14, 2014·0 cites·12 claims
- 1748US2006176928A1Substrate processing apparatus, control method adopted in substrate processing apparatus and programTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1843US12444632B2System of processing substrate, transfer method, transfer program, and holderTOKYO ELECTRON LTD·Filed 2019·Granted Oct 14, 2025·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →