Inventor · disambiguated record
Seiji Katsuoka
Also filed as: KATSUOKA SEIJI
46 granted patents·10 pending applications·797 citations·filing 1995–2023
98Inventor score
Top patents by PatentIndex Score
56 records- 0199US11583973B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 21, 2023·4 cites·14 claims
- 0295US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 0393US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 0493US7101255B2Polishing apparatusEBARA CORP·Filed 2005·Granted Sep 5, 2006·15 cites·12 claims
- 0593US6435949B1Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereofEBARA CORP·Filed 2000·Granted Aug 20, 2002·71 cites·8 claims
- 0692US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 0791US6629883B2Polishing apparatusEBARA CORP·Filed 2001·Granted Oct 7, 2003·68 cites·14 claims
- 0890US7368016B2Substrate processing unit and substrate processing apparatusEBARA CORP·Filed 2005·Granted May 6, 2008·15 cites·5 claims
- 0990US6844274B2Substrate holder, plating apparatus, and plating methodEBARA CORP·Filed 2003·Granted Jan 18, 2005·39 cites·6 claims
- 1090US5643067ADressing apparatus and methodEBARA CORP·Filed 1995·Granted Jul 1, 1997·87 cites·35 claims
- 1189US10688620B2Polishing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·34 claims
- 1287US7442257B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Oct 28, 2008·9 cites·3 claims
- 1386US7575636B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2006·Granted Aug 18, 2009·8 cites·13 claims
- 1485US7087117B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2003·Granted Aug 8, 2006·23 cites·5 claims
- 1584US7585205B2Substrate polishing apparatus and methodEBARA CORP·Filed 2007·Granted Sep 8, 2009·7 cites·23 claims
- 1684US5839947APolishing apparatusEBARA CORP·Filed 1997·Granted Nov 24, 1998·58 cites·14 claims
- 1784US2023158632A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 1883US8777198B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2012·Granted Jul 15, 2014·5 cites·9 claims
- 1983US6413146B1Polishing apparatusEBARA CORP·Filed 2001·Granted Jul 2, 2002·17 cites·24 claims
- 2082US9144881B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Sep 29, 2015·5 cites·9 claims
- 2181US8257143B2Method and apparatus for polishing objectKATSUOKA SEIJI·Filed 2009·Granted Sep 4, 2012·8 cites·8 claims
- 2281US6354918B1Apparatus and method for polishing workpieceEBARA CORP·Filed 1999·Granted Mar 12, 2002·53 cites·9 claims
- 2381US5860847APolishing apparatusEBARA CORP·Filed 1996·Granted Jan 19, 1999·63 cites·15 claims
- 2480US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 2580US6918814B2Polishing apparatusEBARA CORP·Filed 2002·Granted Jul 19, 2005·15 cites·9 claims
- 2680US6332826B1Polishing apparatusEBARA CORP·Filed 1998·Granted Dec 25, 2001·34 cites·98 claims
- 2777US8038136B2Hand having rocking mechanism and substrate delivering device having the sameYASKAWA DENKI SEISAKUSHO KK·Filed 2009·Granted Oct 18, 2011·6 cites·7 claims
- 2871US8141513B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusSEKIMOTO MASAHIKO·Filed 2011·Granted Mar 27, 2012·2 cites·10 claims
- 2969US6402597B1Polishing apparatus and methodEBARA CORP·Filed 2000·Granted Jun 11, 2002·12 cites·25 claims
- 3067US6312312B1Polishing apparatusEBARA CORP·Filed 1998·Granted Nov 6, 2001·27 cites·16 claims
- 3164US7976362B2Substrate polishing apparatus and methodEBARA CORP·Filed 2009·Granted Jul 12, 2011·1 cites·17 claims
- 3263US8225803B2Substrate processing method and apparatusKATSUOKA SEIJI·Filed 2011·Granted Jul 24, 2012·1 cites·4 claims
- 3362US7807027B2Substrate holder, plating apparatus, and plating methodEBARA CORP·Filed 2004·Granted Oct 5, 2010·6 cites·5 claims
- 3462US7235135B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2003·Granted Jun 26, 2007·9 cites·9 claims
- 3562US5647792APolishing apparatusEBARA CORP·Filed 1995·Granted Jul 15, 1997·23 cites·22 claims
- 3661US9687957B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 27, 2017·0 cites·29 claims
- 3760US5931723APolishing apparatusEBARA CORP·Filed 1997·Granted Aug 3, 1999·21 cites·30 claims
- 3857US6293858B1Polishing deviceEBARA CORP·Filed 1999·Granted Sep 25, 2001·21 cites·20 claims
- 3954US7735450B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Jun 15, 2010·0 cites·10 claims
- 4054US7341634B2Apparatus for and method of processing substrateEBARA CORP·Filed 2003·Granted Mar 11, 2008·4 cites·10 claims
- 4151US7886685B2Substrate holding apparatus, substrate holding method, and substrate processing apparatusEBARA CORP·Filed 2004·Granted Feb 15, 2011·2 cites·2 claims
- 4251US2006243204A1Substrate processing apparatus and substrate processing methodKATSUOKA SEIJI·Filed 2006·Application pending·0 cites
- 4350US7959977B2Substrate processing method and apparatusEBARA CORP·Filed 2010·Granted Jun 14, 2011·0 cites·4 claims
- 4450US6139677APolishing apparatusEBARA CORP·Filed 1997·Granted Oct 31, 2000·13 cites·8 claims
- 4549US8133376B2Substrate holder, plating apparatus, and plating methodYOSHIOKA JUNICHIRO·Filed 2010·Granted Mar 13, 2012·0 cites·5 claims
- 4648US2005023149A1Plating apparatus, plating method and substrate processing apparatusFiled 2004·Application pending·0 cites
- 4747US2011237163A1Substrate polishing apparatus and methodKATSUOKA SEIJI·Filed 2011·Application pending·0 cites
- 4845US2005051434A1Method and apparatus for controlling electrolytic solutionFiled 2004·Application pending·0 cites
- 4944US7374646B2Electrolytic processing apparatus and substrate processing methodEBARA CORP·Filed 2004·Granted May 20, 2008·2 cites·2 claims
- 5044US2004256221A1Electrolytic solution supply and recovery facility and liquid component replenishment apparatusFiled 2004·Application pending·0 cites
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →