Inventor · disambiguated record
Serguei Komarov
Also filed as: KOMAROV SERGUEI
3 granted patents·2 pending applications·27 citations·filing 2003–2016
69Inventor score
Top patents by PatentIndex Score
5 records- 0188US9330990B2Method of endpoint detection of plasma etching process using multivariate analysisTOKYO ELECTRON LTD·Filed 2013·Granted May 3, 2016·10 cites·10 claims
- 0288US8666703B2Method for automated determination of an optimally parameterized scatterometry modelFERNS JASON·Filed 2010·Granted Mar 4, 2014·12 cites·17 claims
- 0386US10002804B2Method of endpoint detection of plasma etching process using multivariate analysisTOKYO ELECTRON LTD·Filed 2016·Granted Jun 19, 2018·5 cites·9 claims
- 0436US2006187466A1Selecting unit cell configuration for repeating structures in optical metrologyTIMBRE TECH INC·Filed 2005·Application pending·0 cites
- 0533US2004000535A1Process for etching photomasksFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →