Inventor · disambiguated record
Seiji Kozawa
Also filed as: KOZAWA SEIJI
5 granted patents·1 pending application·56 citations·filing 1998–2012
79Inventor score
Top patents by PatentIndex Score
6 records- 0173US6814809B2Coating and developing apparatus and pattern forming methodTOKYO ELECTRON LTD·Filed 2001·Granted Nov 9, 2004·16 cites·18 claims
- 0269US6332751B1Transfer device centering method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 25, 2001·11 cites·16 claims
- 0367US6643564B2Method of determining retreat permission position of carrier arm and teaching device thereofTOKYO ELECTRON LTD·Filed 2003·Granted Nov 4, 2003·13 cites·8 claims
- 0449US6050389ACarrier apparatus with more than one carrier belts and processing apparatus therewithTOKYO ELECTRON LTD·Filed 1998·Granted Apr 18, 2000·16 cites·21 claims
- 0541US2005042555A1Coating and developing apparatus and pattern forming methodTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 0636US8812266B2Abnormality determination system and abnormality determination method for processing apparatusNAKAMURA NAOTO·Filed 2012·Granted Aug 19, 2014·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Seiji Kozawa files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →