Inventor · disambiguated record
Senthil Lakshmanan
Also filed as: LAKSHMANAN SENTHIL · LAKSHMANAN SENTHIL KUMAR
1 granted patent·4 pending applications·0 citations·filing 2017–2024
4Inventor score
Top patents by PatentIndex Score
5 records- 0156US2024295828A1Method and measuring device for inspecting photomasks, and euv cameraZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0255US2024353757A1Measurement apparatus and method for inspecting photomasks intended for euv microlithographyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0354US2025175589A1Test system for a camera, mask inspections system and method for testing a cameraZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0447US2024353768A1Measuring device and method for inspecting photomasks intended for euv microlithographyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0539US11442263B2Method and devices for displaying stereoscopic imagesZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Sep 13, 2022·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →