Inventor · disambiguated record
Senzi Li
Also filed as: LI SENZI
4 granted patents·144 citations·filing 2002–2009
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0191US8058181B1Method for post-etch cleansCHEN DAVID L·Filed 2009·Granted Nov 15, 2011·42 cites·20 claims
- 0290US7569492B1Method for post-etch cleansNOVELLUS SYSTEMS INC·Filed 2008·Granted Aug 4, 2009·19 cites·16 claims
- 0386US6693043B1Method for removing photoresist from low-k films in a downstream plasma systemNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 17, 2004·56 cites·36 claims
- 0482US7390755B1Methods for post etch cleansNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 24, 2008·27 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →