Inventor · disambiguated record
Seyed Iman Mossavat
Also filed as: MOSSAVAT SEYED IMAN
12 granted patents·1 pending application·5 citations·filing 2014–2021
82Inventor score
Files withASML NETHERLANDS BV13
Top patents by PatentIndex Score
13 records- 0179US10627213B2Statistical hierarchical reconstruction from metrology dataASML NETHERLANDS BV·Filed 2016·Granted Apr 21, 2020·2 cites·20 claims
- 0274US12204298B2Methods of modelling systems for performing predictive maintenance of systems, such as lithographic systemsASML NETHERLANDS BV·Filed 2021·Granted Jan 21, 2025·1 cites·20 claims
- 0373US10996568B2Methods and apparatus for metrologyASML NETHERLANDS BV·Filed 2019·Granted May 4, 2021·1 cites·16 claims
- 0467US10901323B2Metrology method and apparatus with increased bandwidthASML NETHERLANDS BV·Filed 2020·Granted Jan 26, 2021·0 cites·20 claims
- 0567US10369752B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2016·Granted Aug 6, 2019·1 cites·15 claims
- 0662US10732514B2Metrology method and apparatus with increased bandwidthASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·0 cites·15 claims
- 0756US11392043B2Method and metrology apparatus for determining estimated scattered radiation intensityASML NETHERLANDS BV·Filed 2019·Granted Jul 19, 2022·0 cites·7 claims
- 0851US9760018B2Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structureASML NETHERLANDS BV·Filed 2014·Granted Sep 12, 2017·0 cites·19 claims
- 0948US2023040124A1Method for correcting measurements in the manufacture of integrated circuits and associated apparatusesASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 1044US10429746B2Estimation of data in metrologyASML NETHERLANDS BV·Filed 2018·Granted Oct 1, 2019·0 cites·20 claims
- 1143US11556060B2Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Jan 17, 2023·0 cites·19 claims
- 1240US10151985B2Process flagging and cluster detection without requiring reconstructionASML NETHERLANDS BV·Filed 2016·Granted Dec 11, 2018·0 cites·20 claims
- 1338US10156797B2Method of determining edge placement error, inspection apparatus, patterning device, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Dec 18, 2018·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →