Inventor · disambiguated record
Seetharaman Ramachandran
Also filed as: RAMACHANDRAN SEETHARAMAN
3 granted patents·4 pending applications·5 citations·filing 2006–2021
57Inventor score
Top patents by PatentIndex Score
7 records- 0171US8525139B2Method and apparatus of halogen removalSINGH HARMEET·Filed 2010·Granted Sep 3, 2013·3 cites·20 claims
- 0263US9412670B2System, method and apparatus for RF power compensation in plasma etch chamberLAM RES CORP·Filed 2013·Granted Aug 9, 2016·2 cites·19 claims
- 0355US12444579B2Mid-ring erosion compensation in substrate processing systemsLAM RES CORP·Filed 2020·Granted Oct 14, 2025·0 cites·6 claims
- 0449US2010119708A1Filling structures of high aspect ratio elements for growth amplification and device fabricationUNIV TEXAS·Filed 2006·Application pending·0 cites
- 0542US2022285136A1Edge ring systems for substrate processing systemsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0642US2023369025A1High precision edge ring centering for substrate processing systemsLAM RES CORP·Filed 2020·Application pending·0 cites
- 0740US2023122167A1Method for conditioning a plasma processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →