Inventor · disambiguated record
Semyon Sherstinsky
Also filed as: SHERSTINSKY SEMYON
29 granted patents·2,012 citations·filing 1985–2008
98Inventor score
Top patents by PatentIndex Score
29 records- 0197US7480129B2Detachable electrostatic chuck for supporting a substrate in a process chamberAPPLIED MATERIALS INC·Filed 2005·Granted Jan 20, 2009·87 cites·31 claims
- 0296US7244344B2Physical vapor deposition plasma reactor with VHF source power applied through the workpieceAPPLIED MATERIALS INC·Filed 2005·Granted Jul 17, 2007·34 cites·11 claims
- 0395US6350320B1Heater for processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 26, 2002·293 cites·28 claims
- 0495US5745331AElectrostatic chuck with conformal insulator filmAPPLIED MATERIALS INC·Filed 1995·Granted Apr 28, 1998·166 cites·42 claims
- 0594US6464795B1Substrate support member for a processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·98 cites·28 claims
- 0694US6464790B1Substrate support memberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·126 cites·23 claims
- 0793US6726805B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2002·Granted Apr 27, 2004·56 cites·27 claims
- 0892US6652713B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2001·Granted Nov 25, 2003·47 cites·36 claims
- 0992US5326725AClamping ring and susceptor thereforAPPLIED MATERIALS INC·Filed 1993·Granted Jul 5, 1994·166 cites·13 claims
- 1091US7907384B2Detachable electrostatic chuck for supporting a substrate in a process chamberAPPLIED MATERIALS INC·Filed 2008·Granted Mar 15, 2011·13 cites·25 claims
- 1191US6837968B2Lower pedestal shieldAPPLIED MATERIALS INC·Filed 2003·Granted Jan 4, 2005·40 cites·17 claims
- 1290US5740009AApparatus for improving wafer and chuck edge protectionAPPLIED MATERIALS INC·Filed 1996·Granted Apr 14, 1998·117 cites·24 claims
- 1389US7697260B2Detachable electrostatic chuckAPPLIED MATERIALS INC·Filed 2004·Granted Apr 13, 2010·35 cites·19 claims
- 1488US5753132AMethod of making electrostatic chuck with conformal insulator filmAPPLIED MATERIALS INC·Filed 1996·Granted May 19, 1998·78 cites·34 claims
- 1588US5292399APlasma etching apparatus with conductive means for inhibiting arcingAPPLIED MATERIALS INC·Filed 1992·Granted Mar 8, 1994·123 cites·33 claims
- 1684US7252737B2Pedestal with integral shieldAPPLIED MATERIALS INC·Filed 2004·Granted Aug 7, 2007·22 cites·10 claims
- 1783US5985033AApparatus and method for delivering a gasAPPLIED MATERIALS INC·Filed 1997·Granted Nov 16, 1999·57 cites·25 claims
- 1883US4627288ABearing unloading mechanism for disc clamping unitGUZIK TECHNICAL ENTERPRISES·Filed 1985·Granted Dec 9, 1986·35 cites·13 claims
- 1982US5883778AElectrostatic chuck with fluid flow regulatorAPPLIED MATERIALS INC·Filed 1995·Granted Mar 16, 1999·68 cites·25 claims
- 2079US6557248B1Method of fabricating an electrostatic chuckAPPLIED MATERIALS INC·Filed 1998·Granted May 6, 2003·47 cites·9 claims
- 2179US5421401ACompound clamp ring for semiconductor wafersAPPLIED MATERIALS INC·Filed 1994·Granted Jun 6, 1995·69 cites·8 claims
- 2276US6278600B1Electrostatic chuck with improved temperature control and puncture resistanceAPPLIED MATERIALS INC·Filed 1999·Granted Aug 21, 2001·46 cites·13 claims
- 2376US5673922AApparatus for centering substrates on support membersAPPLIED MATERIALS INC·Filed 1995·Granted Oct 7, 1997·52 cites·42 claims
- 2468US6248176B1Apparatus and method for delivering a gasAPPLIED MATERIALS INC·Filed 1999·Granted Jun 19, 2001·28 cites·20 claims
- 2567US6270621B1Etch chamberAPPLIED MATERIALS INC·Filed 2000·Granted Aug 7, 2001·9 cites·3 claims
- 2665US5671117AElectrostatic chuckAPPLIED MATERIALS INC·Filed 1996·Granted Sep 23, 1997·27 cites·8 claims
- 2762US5634266AMethod of making a dielectric chuckAPPLIED MATERIALS INC·Filed 1995·Granted Jun 3, 1997·23 cites·1 claims
- 2858US5316278AClamping ring apparatus for processing semiconductor wafersAPPLIED MATERIALS INC·Filed 1992·Granted May 31, 1994·29 cites·15 claims
- 2956US6123864AEtch chamberAPPLIED MATERIALS INC·Filed 1994·Granted Sep 26, 2000·21 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →