Inventor · disambiguated record
Shuhei Akahane
Also filed as: AKAHANE SHUHEI
1 granted patent·1 pending application·0 citations·filing 2021–2022
3Inventor score
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0155US12494354B2Substrate processing system, information processing apparatus, and information processing method for dynamic control of substrate plasma processingTOKYO ELECTRON LTD·Filed 2022·Granted Dec 9, 2025·0 cites·20 claims
- 0239US2022075358A1Analysis device, plasma process control system, and recording mediumTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →