Inventor · disambiguated record
Shekhar Athani
Also filed as: ATHANI SHEKHAR
3 granted patents·4 pending applications·9 citations·filing 2016–2025
59Inventor score
Files withAPPLIED MATERIALS INC7
Top patents by PatentIndex Score
7 records- 0187US10388549B2On-board metrology (OBM) design and implication in process toolAPPLIED MATERIALS INC·Filed 2016·Granted Aug 20, 2019·8 cites·14 claims
- 0283US12112972B2Rotating biasable pedestal and electrostatic chuck in semiconductor process chamberAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·1 cites·18 claims
- 0373US2025022745A1Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor Process ChamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0472US2025293072A1Electrostatic chuck with improved temperature controlAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 0563US2025163607A1Low temperature epi chamberAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0662US12322633B2Electrostatic chuck with improved temperature controlAPPLIED MATERIALS INC·Filed 2021·Granted Jun 3, 2025·0 cites·15 claims
- 0757US2025037974A1Chamber for substrate backside and bevel depositionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Shekhar Athani files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →