Inventor · disambiguated record
Shriram Vasant Bapat
Also filed as: BAPAT SHRIRAM VASANT
1 granted patent·3 pending applications·2 citations·filing 2020–2024
20Inventor score
Technology areasH10P
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0184US12087573B2Modulation of oxidation profile for substrate processingLAM RES CORP·Filed 2020·Granted Sep 10, 2024·2 cites·22 claims
- 0269US2024404822A1Modulation of oxidation profile for substrate processingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0342US2024213060A1Apparatuses for measuring gap between a substrate support plane and gas distribution deviceLAM RES CORP·Filed 2022·Application pending·0 cites
- 0438US2024003010A1Backside deposition and local stress modulation for wafer bow compensationLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →