Inventor · disambiguated record
Shu-Hao Chang
Also filed as: CHANG SHU-HAO · CHANG SHU-HAO L
49 granted patents·9 pending applications·975 citations·filing 2009–2025
97Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD18ELITE MATERIAL CO LTD11E INK HOLDINGS INC8INPRIA CORP6TAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
58 records- 0198US10018920B2Lithography patterning with a gas phase resistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jul 10, 2018·417 cites·20 claims
- 0298US9570302B1Method of patterning a material layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Feb 14, 2017·419 cites·20 claims
- 0397US10459352B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 29, 2019·10 cites·20 claims
- 0494US8765330B2Phase shift mask for extreme ultraviolet lithography and method of fabricating sameSHIH CHIA-TSUNG·Filed 2012·Granted Jul 1, 2014·85 cites·20 claims
- 0591US11111383B2Resin composition and article made therefromELITE MATERIAL CO LTD·Filed 2019·Granted Sep 7, 2021·2 cites·17 claims
- 0689US10894865B2Prepolymerized resin, preparation method thereof, resin composition comprising the same, and article made therefromELITE MATERIAL CO LTD·Filed 2018·Granted Jan 19, 2021·2 cites·13 claims
- 0787US11384239B2Resin composition and article made therefromELITE MATERIAL CO LTD·Filed 2020·Granted Jul 12, 2022·1 cites·11 claims
- 0885US9140987B2Method for lithography patterningTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Sep 22, 2015·7 cites·20 claims
- 0984US9665007B2Rotary EUV collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 30, 2017·2 cites·20 claims
- 1084US9569993B2Pixel array comprising selection linesE INK HOLDINGS INC·Filed 2014·Granted Feb 14, 2017·4 cites·12 claims
- 1183US11921434B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 1283US10015732B2Method of dynamic frequency selection and an electronic device employing the sameAMBIT MICROSYSTEMS SHANGHAI·Filed 2017·Granted Jul 3, 2018·3 cites·14 claims
- 1383US2025298317A1Stabilized interfaces of inorganic radiation patterning compositions on substratesINPRIA CORP·Filed 2025·Application pending·0 cites
- 1480US11740563B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 29, 2023·0 cites·20 claims
- 1580US9229326B2Method for integrated circuit patterningTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Jan 5, 2016·4 cites·20 claims
- 1679US10067418B2Particle removal system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 4, 2018·2 cites·20 claims
- 1778US10274838B2System and method for performing lithography process in semiconductor device fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 30, 2019·2 cites·20 claims
- 1877US9389506B2Photoresist having improved extreme-ultraviolet lithography imaging performanceTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jul 12, 2016·1 cites·20 claims
- 1977US2024369923A1Organometallic radiation patternable coatings with low defectivity and corresponding methodsINPRIA CORP·Filed 2024·Application pending·0 cites
- 2076US9775103B2Method of dynamic frequency selection and an electronic device employing the sameAMBIT MICROSYSTEMS (SHANGHAI) LTD·Filed 2015·Granted Sep 26, 2017·2 cites·14 claims
- 2176US9247615B2Display panelE INK HOLDINGS INC·Filed 2013·Granted Jan 26, 2016·2 cites·10 claims
- 2275US12399426B2Patterned organometallic photoresists and methods of patterningINPRIA CORP·Filed 2022·Granted Aug 26, 2025·0 cites·21 claims
- 2374US12486397B2Resin composition and article manufactured using the sameELITE MATERIAL CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·21 claims
- 2474US11643507B2Prepolymerized resin, preparation method thereof, resin composition comprising the same, and article made therefromELITE MATERIAL CO LTD·Filed 2020·Granted May 9, 2023·0 cites·2 claims
- 2574US9607833B2System and method for photomask particle detectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 28, 2017·2 cites·19 claims
- 2674US2025304786A1Resin composition and article manufactured using the sameELITE MATERIAL CO LTD·Filed 2024·Application pending·0 cites
- 2774US2025354006A1Resin composition and article manufactured using the sameELITE MATERIAL CO LTD·Filed 2024·Application pending·0 cites
- 2873US2025011594A1Resin composition and article made therefromELITE MATERIAL CO LTD·Filed 2023·Application pending·0 cites
- 2971US9429858B2Rotary EUV collectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 30, 2016·1 cites·20 claims
- 3070US11256179B2Mask cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 22, 2022·0 cites·20 claims
- 3169US10795270B2Methods of defect inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 6, 2020·1 cites·19 claims
- 3269US9081280B2Photoresist having improved extreme-ultraviolet lithography imaging performanceCHANG SHU-HAO·Filed 2011·Granted Jul 14, 2015·1 cites·19 claims
- 3368US9190403B2Display panelE INK HOLDINGS INC·Filed 2014·Granted Nov 17, 2015·1 cites·8 claims
- 3467US12122912B2Composition comprising maleimide pre-polymerized resinELITE MATERIAL CO LTD·Filed 2021·Granted Oct 22, 2024·0 cites·9 claims
- 3567US11180653B2Resin composition and article made therefromELITE ELECTRONIC MAT KUNSHAN CO LTD·Filed 2020·Granted Nov 23, 2021·0 cites·16 claims
- 3667US9542879B2Display panelE INK HOLDINGS INC·Filed 2015·Granted Jan 10, 2017·1 cites·9 claims
- 3766US12360454B2Stabilized interfaces of inorganic radiation patterning compositions on substratesINPRIA CORP·Filed 2020·Granted Jul 15, 2025·0 cites·23 claims
- 3866US8853555B2Bonding structureE INK HOLDINGS INC·Filed 2013·Granted Oct 7, 2014·2 cites·10 claims
- 3965US12072626B2Organometallic radiation patternable coatings with low defectivity and corresponding methodsINPRIA CORP·Filed 2021·Granted Aug 27, 2024·0 cites·20 claims
- 4065US9159559B2Lithography layer with quenchers to prevent pattern collapseTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 13, 2015·1 cites·19 claims
- 4163US10976672B2System and method for performing lithography process in semiconductor device fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 13, 2021·0 cites·18 claims
- 4262US11480874B2Patterned organometallic photoresists and methods of patterningINPRIA CORP·Filed 2019·Granted Oct 25, 2022·0 cites·23 claims
- 4362US10865221B2Phosphorus-containing flame retardant, preparation method thereof, resin composition comprising the phosphorus-containing flame retardant and article made therefromELITE MATERIAL CO LTD·Filed 2018·Granted Dec 15, 2020·0 cites·12 claims
- 4461US11624985B2Methods of defect inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 11, 2023·0 cites·20 claims
- 4559US11339287B2Resin composition and article made therefromELITE ELECTRONIC MAT ZHONGSHAN CO LTD·Filed 2020·Granted May 24, 2022·0 cites·15 claims
- 4658US10514610B2Lithography patterning with a gas phase resistTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·0 cites·20 claims
- 4757US2025309670A1Battery charging method and deviceDELTA ELECTRONICS INC·Filed 2024·Application pending·0 cites
- 4856US11862076B2Light-emitting diode display moduleAUO CORP·Filed 2023·Granted Jan 2, 2024·0 cites·13 claims
- 4954US10557033B2Resin composition suitable for rigid-flex board and use thereofELITE MATERIAL CO LTD·Filed 2016·Granted Feb 11, 2020·0 cites·12 claims
- 5054US9780123B2Display panelE INK HOLDINGS INC·Filed 2015·Granted Oct 3, 2017·0 cites·20 claims
Showing the top 50 of 58 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →