Inventor · disambiguated record
Shih-Chanh Chang
Also filed as: CHANG SHIH-CHANH
5 granted patents·217 citations·filing 1993–1999
83Inventor score
Files withUNITED MICROELECTRONICS CORP5
Top patents by PatentIndex Score
5 records- 0188US5364817ATungsten-plug processUNITED MICROELECTRONICS CORP·Filed 1994·Granted Nov 15, 1994·95 cites·20 claims
- 0276US5393702AVia sidewall SOG nitridation for via fillingUNITED MICROELECTRONICS CORP·Filed 1993·Granted Feb 28, 1995·58 cites·11 claims
- 0371US6207567B1Fabricating method of glue layer and barrier layerUNITED MICROELECTRONICS CORP·Filed 1999·Granted Mar 27, 2001·44 cites·14 claims
- 0455US5739046AMethod of making a reliable barrier layerUNITED MICROELECTRONICS CORP·Filed 1996·Granted Apr 14, 1998·17 cites·41 claims
- 0530US6440841B2Method of fabricating viasUNITED MICROELECTRONICS CORP·Filed 1999·Granted Aug 27, 2002·3 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →