Inventor · disambiguated record
Shang Chen
Also filed as: CHEN SHANG · CHEN SHANG CHIEN
23 granted patents·2 pending applications·2,063 citations·filing 2013–2021
97Inventor score
Top patents by PatentIndex Score
25 records- 0198US10741386B2Deposition of SiNASM IP HOLDING BV·Filed 2019·Granted Aug 11, 2020·282 cites·23 claims
- 0298US10480064B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2018·Granted Nov 19, 2019·47 cites·20 claims
- 0398US10424477B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Sep 24, 2019·298 cites·24 claims
- 0498US10395917B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2018·Granted Aug 27, 2019·405 cites·19 claims
- 0598US10041166B2Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Aug 7, 2018·57 cites·20 claims
- 0698US10014212B2Selective deposition of metallic filmsASM IP HOLDING BV·Filed 2017·Granted Jul 3, 2018·397 cites·18 claims
- 0798US9905416B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2017·Granted Feb 27, 2018·19 cites·19 claims
- 0898US9824881B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2013·Granted Nov 21, 2017·304 cites·25 claims
- 0998US9803277B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·87 cites·19 claims
- 1098US9805974B1Selective deposition of metallic filmsASM IP HOLDING BV·Filed 2016·Granted Oct 31, 2017·66 cites·21 claims
- 1197US9576792B2Deposition of SiNASM IP HOLDING BV·Filed 2015·Granted Feb 21, 2017·23 cites·28 claims
- 1297US9564309B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2014·Granted Feb 7, 2017·29 cites·16 claims
- 1396US10793946B1Reaction chamber passivation and selective deposition of metallic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 6, 2020·17 cites·21 claims
- 1496US10410857B2Formation of SiN thin filmsASM IP HOLDING BV·Filed 2015·Granted Sep 10, 2019·13 cites·10 claims
- 1593US10262854B2Deposition of SiNASM IP HOLDING BV·Filed 2017·Granted Apr 16, 2019·6 cites·19 claims
- 1690US11069522B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2019·Granted Jul 20, 2021·3 cites·18 claims
- 1788US11784043B2Formation of SiN thin filmsASM IP HOLDING BV·Filed 2021·Granted Oct 10, 2023·1 cites·20 claims
- 1888US11133181B2Formation of SiN thin filmsASM IP HOLDING BV·Filed 2019·Granted Sep 28, 2021·3 cites·20 claims
- 1987US9947582B1Processes for preventing oxidation of metal thin filmsASM IP HOLDING BV·Filed 2017·Granted Apr 17, 2018·5 cites·21 claims
- 2077US11289327B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2019·Granted Mar 29, 2022·1 cites·19 claims
- 2175US11587783B2Si precursors for deposition of SiN at low temperaturesASM IP HOLDING BV·Filed 2020·Granted Feb 21, 2023·0 cites·20 claims
- 2273US11367613B2Deposition of SiNASM IP HOLDING BV·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
- 2358US2017372886A1Deposition of SiNASM IP HOLDING BV·Filed 2017·Application pending·0 cites
- 2451US11682660B2Semiconductor structureADVANCED SEMICONDUCTOR ENG·Filed 2020·Granted Jun 20, 2023·0 cites·6 claims
- 2543US2014273531A1Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURESASM IP HOLDING BV·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →