Inventor · disambiguated record
Shih-Yuan Cheng
Also filed as: CHENG SHIH-YUAN
4 granted patents·3 pending applications·24 citations·filing 2001–2022
75Inventor score
Top patents by PatentIndex Score
7 records- 0183US9466502B2Line width roughness improvement with noble gas plasmaLAM RES CORP·Filed 2016·Granted Oct 11, 2016·3 cites·13 claims
- 0278US9263284B2Line width roughness improvement with noble gas plasmaLAM RES CORP·Filed 2014·Granted Feb 16, 2016·3 cites·15 claims
- 0374US8753804B2Line width roughness improvement with noble gas plasmaCHENG SHIH-YUAN·Filed 2009·Granted Jun 17, 2014·5 cites·12 claims
- 0466US6977184B1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2001·Granted Dec 20, 2005·13 cites·18 claims
- 0553US2023245865A1Movable disk with aperture for etch controlLAM RES CORP·Filed 2022·Application pending·0 cites
- 0653US2024355597A1Ion beam etch system and methodLAM RES CORP·Filed 2022·Application pending·0 cites
- 0742US2006040415A1Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoringLAM RES CORP·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →