Inventor · disambiguated record
Shota Chida
Also filed as: CHIDA SHOTA
2 granted patents·3 pending applications·0 citations·filing 2022–2023
23Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0158US12049694B2Method for depositing boron nitride film and film deposition apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 30, 2024·0 cites·9 claims
- 0254US12217956B2Carbon film deposition method and deposition apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Feb 4, 2025·0 cites·12 claims
- 0353US2024014031A1Film deposition method and film deposition apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0452US2023420249A1Film forming methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0548US2023245882A1Deposition method and deposition apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →