Inventor · disambiguated record
Shang-I Chou
Also filed as: CHOU SHANG-I
6 granted patents·41 citations·filing 2008–2013
81Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0184US8492736B2Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substratesWANG YEN-KUN VICTOR·Filed 2010·Granted Jul 23, 2013·10 cites·9 claims
- 0281US8060330B2Method and system for centering wafer on chuckO'NEILL ROBERT GRIFFITH·Filed 2008·Granted Nov 15, 2011·12 cites·20 claims
- 0380US8232538B2Method and apparatus of halogen removal using optimal ozone and UV exposureSANT SANKET·Filed 2009·Granted Jul 31, 2012·9 cites·20 claims
- 0478US8624210B2Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substratesLAM RES CORP·Filed 2013·Granted Jan 7, 2014·5 cites·13 claims
- 0571US8525139B2Method and apparatus of halogen removalSINGH HARMEET·Filed 2010·Granted Sep 3, 2013·3 cites·20 claims
- 0663US9412670B2System, method and apparatus for RF power compensation in plasma etch chamberLAM RES CORP·Filed 2013·Granted Aug 9, 2016·2 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →