Inventor · disambiguated record
Shigeki Doba
Also filed as: DOBA SHIGEKI
6 granted patents·4 pending applications·72 citations·filing 2003–2021
79Inventor score
Top patents by PatentIndex Score
10 records- 0187USD491963SInner wall shield for a process chamber for manufacturing semiconductorsTOKYO ELECTRON LTD·Filed 2003·Granted Jun 22, 2004·45 cites·1 claims
- 0280US10090161B2Plasma etching apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 2, 2018·3 cites·7 claims
- 0375USD494551SExhaust ring for manufacturing semiconductorsTOKYO ELECTRON LTD·Filed 2003·Granted Aug 17, 2004·23 cites·1 claims
- 0469US10734201B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Aug 4, 2020·1 cites·8 claims
- 0559US11328904B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 10, 2022·0 cites·5 claims
- 0652US12266562B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Apr 1, 2025·0 cites·17 claims
- 0752US2009229759A1Annular assembly for plasma processing, plasma processing apparatus, and outer annular memberTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0846US2014017900A1Plasma etching apparatus and plasma etching methodDOBA SHIGEKI·Filed 2012·Application pending·0 cites
- 0939US2014311676A1Substrate mounting table and plasma treatment deviceTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 1038US2018151380A1Substrate processing apparatus and heat shield plateTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →