Inventor · disambiguated record
Shota Ezaki
Also filed as: EZAKI Shota
4 granted patents·8 pending applications·3 citations·filing 2019–2025
61Inventor score
Top patents by PatentIndex Score
12 records- 0194US11784066B2Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 10, 2023·3 cites·21 claims
- 0279US12354890B2Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 8, 2025·0 cites·18 claims
- 0379US2025273487A1Stage and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0473US2025022724A1Substrate supportTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0565US2025157797A1Placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0661US2025087470A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0760US12148636B2Substrate supportTOKYO ELECTRON LTD·Filed 2021·Granted Nov 19, 2024·0 cites·8 claims
- 0860US2024404799A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0958US2021043433A1Placing table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1053US2022415628A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1149US11791177B2Placing table including heat exchange medium path and substrate processing apparatus thereofTOKYO ELECTRON LTD·Filed 2020·Granted Oct 17, 2023·0 cites·5 claims
- 1244US2021195758A1Resin-sealed in-vehicle electronic control deviceHITACHI AUTOMOTIVE SYSTEMS LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →