Inventor · disambiguated record
Shih-Jeun Fan
Also filed as: FAN SHIH-JEUN
5 granted patents·23 citations·filing 2005–2008
73Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0185US7565220B2Targeted data collection architectureLAM RES CORP·Filed 2006·Granted Jul 21, 2009·17 cites·28 claims
- 0266US7536538B1Cluster tools for processing substrates using at least a key fileLAM RES CORP·Filed 2008·Granted May 19, 2009·4 cites·20 claims
- 0360US7162317B2Methods and apparatus for configuring plasma cluster toolsLAM RES CORP·Filed 2005·Granted Jan 9, 2007·1 cites·7 claims
- 0455US7353379B2Methods for configuring a plasma cluster toolLAM RES CORP·Filed 2005·Granted Apr 1, 2008·1 cites·20 claims
- 0541US7542820B2Methods and arrangement for creating recipes using best-known methodsLAM RES CORP·Filed 2006·Granted Jun 2, 2009·0 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →