Inventor · disambiguated record

Shunta Furutani

Also filed as: FURUTANI SHUNTA

2 granted patents·0 citations·filing 2020–2020

22Inventor score

Technology areasH10P

Files withCENTRAL GLASS CO LTD1 TOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0151US11594417B2Etching method and apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Feb 28, 2023·0 cites·13 claims
0239US12154791B2Dry etching method and method for producing semiconductor deviceCENTRAL GLASS CO LTD·Filed 2020·Granted Nov 26, 2024·0 cites·14 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →