Inventor · disambiguated record
Shinichi Hara
Also filed as: HARA SHINICHI · LU HSIENG SEN · ONUMA NOBUO
92 granted patents·9 pending applications·2,133 citations·filing 1976–2023
99Inventor score
Top patents by PatentIndex Score
101 records- 0194US4791719AMethod of manufacturing a thin-film magnetic headHITACHI LTD·Filed 1987·Granted Dec 20, 1988·92 cites·19 claims
- 0293US5063582ALiquid cooled x-ray lithographic exposure apparatusCANON KK·Filed 1991·Granted Nov 5, 1991·91 cites·17 claims
- 0392US6317479B1X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 1997·Granted Nov 13, 2001·75 cites·21 claims
- 0492US5608773AMask holding device, and an exposure apparatus and a device manufacturing method using the deviceCANON KK·Filed 1994·Granted Mar 4, 1997·90 cites·25 claims
- 0591US6011921AIntermediate communication controller that sends transmission data in a predetermined order to a corresponding slave unit upon request from a master controllerFUJITSU LTD·Filed 1997·Granted Jan 4, 2000·222 cites·61 claims
- 0691US5374829AVacuum chuckCANON KK·Filed 1994·Granted Dec 20, 1994·135 cites·9 claims
- 0790US6084938AX-ray projection exposure apparatus and a device manufacturing methodCANON KK·Filed 1997·Granted Jul 4, 2000·52 cites·43 claims
- 0889US5220171AWafer holding device in an exposure apparatusCANON KK·Filed 1991·Granted Jun 15, 1993·117 cites·20 claims
- 0987US8931712B2Fragrance device for vehicle and sealing component used thereinNAGANO HIDEKI·Filed 2010·Granted Jan 13, 2015·18 cites·23 claims
- 1087US4592801AMethod of patterning thin filmCOMPUTER BASIC TECH RES·Filed 1984·Granted Jun 3, 1986·72 cites·23 claims
- 1186US6728332B2X-ray mask, and exposure method and apparatus using the sameCANON KK·Filed 2001·Granted Apr 27, 2004·20 cites·24 claims
- 1286US6349240B2Semiconductor device manufacturing system and method of manufacturing semiconductor devicesNEC CORP·Filed 2001·Granted Feb 19, 2002·41 cites·10 claims
- 1386US5854819AMask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the sameCANON KK·Filed 1997·Granted Dec 29, 1998·60 cites·14 claims
- 1486US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 1585US11635518B2Measurement apparatus and measurement method using a laser and beat signalsMITUTOYO CORP·Filed 2020·Granted Apr 25, 2023·2 cites·10 claims
- 1684US7265812B2Cooling apparatusCANON KK·Filed 2006·Granted Sep 4, 2007·5 cites·15 claims
- 1783US6532182B2Semiconductor memory production system and semiconductor memory production methodNEC CORP·Filed 2001·Granted Mar 11, 2003·29 cites·12 claims
- 1883US5593800AMask manufacturing method and apparatus and device manufacturing method using a mask manufactured by the method or apparatusCANON KK·Filed 1995·Granted Jan 14, 1997·52 cites·16 claims
- 1982US5413167AWafer cooling deviceCANON KK·Filed 1994·Granted May 9, 1995·75 cites·5 claims
- 2081US5485495AX-ray mask, and exposure apparatus and device production using the maskCANON KK·Filed 1994·Granted Jan 16, 1996·34 cites·16 claims
- 2181US4969168AWafer supporting apparatusCANON KK·Filed 1989·Granted Nov 6, 1990·54 cites·8 claims
- 2279US6984362B2Processing apparatus, measuring apparatus, and device manufacturing methodCANON KK·Filed 2003·Granted Jan 10, 2006·26 cites·5 claims
- 2379US5544213AMask holding method, mask and mask chuck, exposure apparatus using the mask and the mask chuck, and device production method using the exposure apparatusCANON KK·Filed 1994·Granted Aug 6, 1996·32 cites·15 claims
- 2478US10120059B2Feedback gain adjusting method and device of tracking-type laser interferometer and tracking-type laser interferometerMITUTOYO CORP·Filed 2017·Granted Nov 6, 2018·3 cites·11 claims
- 2577US11867809B2Measurement apparatus and measurement methodMITUTOYO CORP·Filed 2020·Granted Jan 9, 2024·1 cites·10 claims
- 2677US7158209B2Holding mechanism in exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Jan 2, 2007·4 cites·12 claims
- 2777US4685014AProduction method of thin film magnetic headCOMPUTER BASIC TECHNOLOGY ASS·Filed 1982·Granted Aug 4, 1987·28 cites·25 claims
- 2876US7212274B2Cooling system, exposure apparatus having the same, and device manufacturing methodCANON KK·Filed 2004·Granted May 1, 2007·13 cites·15 claims
- 2976US7145632B2Cooling apparatusCANON KK·Filed 2005·Granted Dec 5, 2006·3 cites·12 claims
- 3076US7054705B2Method of manufacturing semiconductor devicesNEC ELECTRONICS CORP·Filed 2002·Granted May 30, 2006·19 cites·7 claims
- 3176US6714277B2Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Mar 30, 2004·16 cites·52 claims
- 3276US5478498ADisordered fluorite-type photochemical hole burning crystal containing SM2+ as active ionsTOSOH CORP·Filed 1994·Granted Dec 26, 1995·27 cites·10 claims
- 3376US5093579AExposure apparatus with a substrate holding mechanismCANON KK·Filed 1990·Granted Mar 3, 1992·61 cites·16 claims
- 3474US7068348B2Holding mechanism in exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Jun 27, 2006·10 cites·11 claims
- 3574US6935576B2Cleaning nozzle and cleaning apparatusSHIBUYA KOGYO CO LTD·Filed 2001·Granted Aug 30, 2005·21 cites·34 claims
- 3674US6750946B2Processing apparatus for processing sample in predetermined atmosphereCANON KK·Filed 2001·Granted Jun 15, 2004·14 cites·14 claims
- 3774US6616898B2Processing apparatus with pressure control and gas recirculation systemCANON KK·Filed 1999·Granted Sep 9, 2003·36 cites·32 claims
- 3874US5883932ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1995·Granted Mar 16, 1999·38 cites·13 claims
- 3973US4855123AMethod of oxidizing sulfide-containing liquorMITSUBISHI PAPER MILLS LTD·Filed 1988·Granted Aug 8, 1989·27 cites·14 claims
- 4072US7081949B2Illumination apparatus, projection exposure apparatus, and device fabrication methodCANON KK·Filed 2004·Granted Jul 25, 2006·9 cites·11 claims
- 4172US6804323B2Mask pattern magnification correction method, magnification correction apparatus, and mask structureCANON KK·Filed 2002·Granted Oct 12, 2004·11 cites·20 claims
- 4271US6087053ADevice manufacturing method with transfer magnification adjustment to correct thermal distortion of substrateCANON KK·Filed 1998·Granted Jul 11, 2000·29 cites·6 claims
- 4370US5155523AWorkpiece supporting mechanismCANON KK·Filed 1989·Granted Oct 13, 1992·35 cites·30 claims
- 4470US4894737AMagnetic head apparatus having projections extending from at least a front side thereofCANON KK·Filed 1987·Granted Jan 16, 1990·17 cites·16 claims
- 4569US7388674B2Laser tracking interferometerMITUTOYO CORP·Filed 2006·Granted Jun 17, 2008·9 cites·9 claims
- 4668US5999589ASubstrate holding device and exposing apparatus using the sameCANON KK·Filed 1998·Granted Dec 7, 1999·28 cites·16 claims
- 4768US5323440AX-ray lithography apparatus including a dose detectable maskCANON KK·Filed 1993·Granted Jun 21, 1994·21 cites·15 claims
- 4867US7319507B2Apparatus and method for removing contaminant on original, method of manufacturing device, and originalCANON KK·Filed 2005·Granted Jan 15, 2008·2 cites·14 claims
- 4965US7621807B2Fixing mechanism for a container in a vehicle air conditioning deviceVALEO SYSTEMES THERMIQUES·Filed 2006·Granted Nov 24, 2009·1 cites·8 claims
- 5064US7538888B2Method for estimating absolute distance of tracking laser interferometer and tracking laser interferometerMITUTOYO CORP·Filed 2007·Granted May 26, 2009·6 cites·5 claims
Showing the top 50 of 101 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →