Inventor · disambiguated record
Shao-Wen Hsia
Also filed as: HSIA SHAO-WEN
6 granted patents·497 citations·filing 1992–2001
85Inventor score
Top patents by PatentIndex Score
6 records- 0197US5314772AHigh resolution, multi-layer resist for microlithography and method thereforUNIV ARIZONA·Filed 1992·Granted May 24, 1994·438 cites·26 claims
- 0257US6383821B1Semiconductor device and processCONEXANT SYSTEMS INC·Filed 1999·Granted May 7, 2002·22 cites·18 claims
- 0357US6291361B1Method and apparatus for high-resolution in-situ plasma etching of inorganic and metal filmsCONEXANT SYSTEMS INC·Filed 1999·Granted Sep 18, 2001·17 cites·11 claims
- 0456US6798065B2Method and apparatus for high-resolution in-situ plasma etching of inorganic and metals filmsNEWPORT FAB LLC·Filed 2001·Granted Sep 28, 2004·4 cites·17 claims
- 0550US6328848B1Apparatus for high-resolution in-situ plasma etching of inorganic and metal filmsCONEXANT SYSTEMS INC·Filed 2000·Granted Dec 11, 2001·2 cites·7 claims
- 0646US6251568B1Methods and apparatus for stripping photoresist and polymer layers from a semiconductor stack in a non-corrosive environmentCONEXANT SYSTEMS INC·Filed 1999·Granted Jun 26, 2001·14 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →