Inventor · disambiguated record
Shan Hu
Also filed as: HU SHAN
16 granted patents·9 pending applications·9 citations·filing 2008–2024
86Inventor score
Files withTOKYO ELECTRON LTD19WUHAN ENDOANGEL MEDICAL TECH CO LTD2SEAGATE TECHNOLOGY LLC1UNIV SOUTH CAROLINA1WRAZIEN STEPHEN JOHN1
Top patents by PatentIndex Score
25 records- 0187US12100598B2Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) processTOKYO ELECTRON LTD·Filed 2022·Granted Sep 24, 2024·1 cites·21 claims
- 0280US11424123B2Forming a semiconductor feature using atomic layer etchTOKYO ELECTRON LTD·Filed 2020·Granted Aug 23, 2022·1 cites·20 claims
- 0373US12506019B2Wafer chuck designs and methods for retaining a processing liquid on a surface of a semiconductor waferTOKYO ELECTRON LTD·Filed 2024·Granted Dec 23, 2025·0 cites·22 claims
- 0472US2025285884A1Wet Processing Systems Having Novel Wafer Chuck Designs For Retaining A Processing Liquid On A Surface Of A Semiconductor SubstrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0571US2024399422A1Method and single wafer processing system for processing of semiconductor wafersTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0669US2025129116A1Cyclopropanol as a bioorthogonal warhead for electrochemically controlled bioconjugation applicationsUNIV SOUTH CAROLINA·Filed 2024·Application pending·0 cites
- 0767US12103052B2Method and single wafer processing system for processing of semiconductor wafersTOKYO ELECTRON LTD·Filed 2023·Granted Oct 1, 2024·0 cites·22 claims
- 0866US8227701B2Reconfigurable electric circuitry and method of making sameWRAZIEN STEPHEN JOHN·Filed 2009·Granted Jul 24, 2012·5 cites·10 claims
- 0964US11289325B2Radiation of substrates during processing and systems thereofTOKYO ELECTRON LTD·Filed 2021·Granted Mar 29, 2022·0 cites·16 claims
- 1061US7916513B2Non-destructive read back for ferroelectric data storage deviceSEAGATE TECHNOLOGY LLC·Filed 2008·Granted Mar 29, 2011·2 cites·20 claims
- 1161US2022189764A1Radiation of Substrates During Processing and Systems ThereofTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1260US2025372413A1Systems and methods that utilize metal-coated processing heads to improve wet processing of semiconductor substratesTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1359US12148624B2Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET)TOKYO ELECTRON LTD·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 1459US2025308947A1Method and wafer processing system for wet etching a semiconductor waferTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1558US12243749B2Methods to provide uniform wet etching of material within high aspect ratio features provided on a patterned substrateTOKYO ELECTRON LTD·Filed 2022·Granted Mar 4, 2025·0 cites·20 claims
- 1658US12100599B2Wet etch process and method to provide uniform etching of material formed within features having different critical dimension (CD)TOKYO ELECTRON LTD·Filed 2022·Granted Sep 24, 2024·0 cites·20 claims
- 1757US12148625B2Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrateTOKYO ELECTRON LTD·Filed 2022·Granted Nov 19, 2024·0 cites·22 claims
- 1855US12482702B2Wet etch process and methods to form air gaps between metal interconnectsTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·24 claims
- 1953US12400872B2Sacrificial capping layer for gate protectionTOKYO ELECTRON LTD·Filed 2022·Granted Aug 26, 2025·0 cites·20 claims
- 2052US2025226208A1Methods for protecting a peripheral edge and backside of a semiconductor substrateTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 2151US12288698B2Methods for retaining a processing liquid on a surface of a semiconductor substrateTOKYO ELECTRON LTD·Filed 2023·Granted Apr 29, 2025·0 cites·22 claims
- 2249US11532517B2Localized etch stop layerTOKYO ELECTRON LTD·Filed 2020·Granted Dec 20, 2022·0 cites·16 claims
- 2347US2017091714A1Methods, devices and systems for managing calendar dataXIAOMI INC·Filed 2016·Application pending·0 cites
- 2436US11800969B2Method and device for monitoring colonoscope withdrawal speedWUHAN ENDOANGEL MEDICAL TECH CO LTD·Filed 2020·Granted Oct 31, 2023·0 cites·9 claims
- 2531US2022006981A1Method of automatic image freezing of digestive endoscopyWUHAN ENDOANGEL MEDICAL TECH CO LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →