Inventor · disambiguated record
Shigehito Ibuka
Also filed as: IBUKA SHIGEHITO
4 granted patents·535 citations·filing 1989–1992
80Inventor score
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0196US4958061AMethod and apparatus for heat-treating a substrateTOKYO ELECTRON LTD·Filed 1989·Granted Sep 18, 1990·489 cites·10 claims
- 0255US5254176AMethod of cleaning a process tubeTOKYO ELECTRON LTD·Filed 1992·Granted Oct 19, 1993·30 cites·14 claims
- 0339US5180692AMethod for the manufacture of boron-containing films by CVD or epitaxial techniques using boron trifluorideTOKYO ELECTRON LTD·Filed 1991·Granted Jan 19, 1993·12 cites·6 claims
- 0434US5070275AIon implantation deviceTOKYO ELECTRON LTD·Filed 1990·Granted Dec 3, 1991·4 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →