Inventor · disambiguated record
Shigeyuki Iida
Also filed as: IIDA SHIGEYUKI
1 granted patent·1 pending application·1 citations·filing 2014–2024
15Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD2
Top patents by PatentIndex Score
2 records- 0153US9927373B2Substrate processing apparatus, monitoring device of substrate processing apparatus, and monitoring method of substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Mar 27, 2018·1 cites·20 claims
- 0253US2025112066A1Liquid processing apparatus, and monitoring methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →