Inventor · disambiguated record
Shun Itoh
Also filed as: ITOH SHUN · ITOH SHUN-ICHI
1 granted patent·4 pending applications·0 citations·filing 2003–2025
9Inventor score
Top patents by PatentIndex Score
5 records- 0158US2025096006A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0256US12482640B2Cleaning method, substrate processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·13 claims
- 0356US2025357082A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0448US2004014119A1Method of detecting nucleic acidsTOSOH CORP·Filed 2003·Application pending·0 cites
- 0528US2021111008A1Method of determining cleaning conditions and plasma processing deviceTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →