Inventor · disambiguated record
Shuji Iwanaga
Also filed as: IWANAGA SHUJI
18 granted patents·4 pending applications·49 citations·filing 2005–2024
91Inventor score
Top patents by PatentIndex Score
22 records- 0190US10818004B2Substrate defect inspection apparatus, substrate defect inspection method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Oct 27, 2020·5 cites·14 claims
- 0289US9355442B2Film thickness measurement apparatus, film thickness measurement method, and non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted May 31, 2016·12 cites·11 claims
- 0384US11227381B2Substrate defect inspection apparatus, substrate defect inspection method, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Jan 18, 2022·1 cites·7 claims
- 0480US8014895B2Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereonTOKYO ELECTRON LTD·Filed 2005·Granted Sep 6, 2011·6 cites·11 claims
- 0579US12243213B2Substrate inspection device, substrate inspection system, and substrate inspection methodTOKYO ELECTRON LTD·Filed 2020·Granted Mar 4, 2025·1 cites·15 claims
- 0679US2025045903A1Substrate inspection device, substrate inspection system, and substrate inspection methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0777US7815366B2Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereonTOKYO ELECTRON LTD·Filed 2005·Granted Oct 19, 2010·6 cites·4 claims
- 0876US8873849B2Image processing method, image display method, image processing apparatus and a non-transitory computer-readable recording mediumIWANAGA SHUJI·Filed 2012·Granted Oct 28, 2014·3 cites·16 claims
- 0975US9097681B2Inspection device, bonding system and inspection methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 4, 2015·4 cites·9 claims
- 1072US11636585B2Substrate defect inspection apparatus, substrate defect inspection method, and storage mediumTOKYO ELECTRON LTD·Filed 2021·Granted Apr 25, 2023·0 cites·11 claims
- 1170US8379965B2Defect classification method, computer storage medium, and defect classification apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Feb 19, 2013·3 cites·17 claims
- 1269US9039863B2Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing programTOKYO ELECTRON LTD·Filed 2012·Granted May 26, 2015·2 cites·10 claims
- 1369US8874254B2Temperature setting method of heat processing plate, temperature setting apparatus of heat processing plate, program, and computer-readable recording medium recording program thereonIWANAGA SHUJI·Filed 2011·Granted Oct 28, 2014·2 cites·14 claims
- 1468US9146479B2Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Sep 29, 2015·1 cites·16 claims
- 1557US8989477B2Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Mar 24, 2015·1 cites·9 claims
- 1655US8212869B2Substrate inspection method, substrate inspection system and storage mediumIWANAGA SHUJI·Filed 2009·Granted Jul 3, 2012·2 cites·9 claims
- 1755US2025045906A1Information processing method, information processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1849US9342880B2Defect analyzing apparatus, substrate processing system, defect analyzing method and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted May 17, 2016·0 cites·12 claims
- 1943US2014152807A1Substrate defect inspection method, substrate defect inspection apparatus and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 2042US9229337B2Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2012·Granted Jan 5, 2016·0 cites·10 claims
- 2139US2014055599A1Inspection device, bonding system and inspection methodTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 2236US8311316B2Defect inspecting method, defect inspecting apparatus, and storage medium storing defect inspection programIWANAGA SHUJI·Filed 2010·Granted Nov 13, 2012·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →