Inventor · disambiguated record
Shunsuke Kagaya
Also filed as: KAGAYA SHUNSUKE
1 granted patent·7 pending applications·0 citations·filing 2008–2024
6Inventor score
Top patents by PatentIndex Score
8 records- 0157US2025207292A1Apparatus for processing substrate, method of controlling apparatus for processing substrate, and storage medium with program stored thereinEBARA CORP·Filed 2024·Application pending·0 cites
- 0255US2025225022A1Method for operating semiconductor manufacturing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0353US2025198042A1Apparatus for processing substrate, method of controlling apparatus for processing substrate, and storage medium with program stored thereinEBARA CORP·Filed 2024·Application pending·0 cites
- 0451US2025183100A1Method for determining health index of substrate processing apparatus and substrate processing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 0545US2025252548A1Video acquisition support apparatus, video acquisition support method, and storage medium storing programEBARA CORP·Filed 2024·Application pending·0 cites
- 0640US2024213065A1Method for calculating throughput in semiconductor manufacturing apparatus, semiconductor manufacturing apparatus, and computer program productEBARA CORP·Filed 2023·Application pending·0 cites
- 0733US2009019216A1Disk drive device and method for saving a table for managing data in non-volatile semiconductor memory in disk drive deviceYAMADA SHUHJI·Filed 2008·Application pending·0 cites
- 0827US8110413B2Mask pattern verification apparatus, mask pattern verification method and method of fabricating a semiconductor deviceKODAMA CHIKAAKI·Filed 2010·Granted Feb 7, 2012·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →