Inventor · disambiguated record
Shuichi Kamata
Also filed as: KAMATA SHUICHI
2 granted patents·2 pending applications·2 citations·filing 2017–2020
35Inventor score
Files withEBARA CORP4
Top patents by PatentIndex Score
4 records- 0164US10029344B2Polishing apparatus and polishing methodEBARA CORP·Filed 2017·Granted Jul 24, 2018·2 cites·11 claims
- 0251US2021008684A1Substrate processing apparatus and storage mediumEBARA CORP·Filed 2020·Application pending·0 cites
- 0347US2019351526A1Method of detecting a polishing surface of a polishing pad using a polishing head, and polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
- 0443US10926374B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 23, 2021·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →