Inventor · disambiguated record
Shiguma Kato
Also filed as: KATO SHIGUMA
11 granted patents·10 pending applications·14 citations·filing 2015–2024
83Inventor score
Top patents by PatentIndex Score
21 records- 0182US10777395B2Processing apparatus and collimatorTOSHIBA KK·Filed 2016·Granted Sep 15, 2020·4 cites·9 claims
- 0282US10774420B2Flow passage structure and processing apparatusTOSHIBA KK·Filed 2017·Granted Sep 15, 2020·3 cites·11 claims
- 0381US9586303B2Polishing device and method for polishing semiconductor waferTOSHIBA KK·Filed 2015·Granted Mar 7, 2017·4 cites·18 claims
- 0479US10312113B2Flow passage structure, intake and exhaust member, and processing apparatusTOSHIBA KK·Filed 2015·Granted Jun 4, 2019·3 cites·19 claims
- 0566US2019151864A1Nozzle device and processing apparatusTOSHIBA KK·Filed 2019·Application pending·0 cites
- 0659US2024312803A1Substrate processing deviceKIOXIA CORP·Filed 2024·Application pending·0 cites
- 0756US12424460B2Substrate processing apparatusKIOXIA CORP·Filed 2022·Granted Sep 23, 2025·0 cites·21 claims
- 0854US10755904B2Processing apparatus and collimatorTOSHIBA KK·Filed 2018·Granted Aug 25, 2020·0 cites·13 claims
- 0953US10220394B2Nozzle device and processing apparatusTOSHIBA KK·Filed 2015·Granted Mar 5, 2019·0 cites·6 claims
- 1049US10147589B2Processing apparatus and collimatorTOSHIBA KK·Filed 2015·Granted Dec 4, 2018·0 cites·16 claims
- 1148US2018265964A1Collimator and processing apparatusTOSHIBA KK·Filed 2018·Application pending·0 cites
- 1245US2019022609A1Mixer structure, fluid passage device, and processing deviceTOSHIBA KK·Filed 2016·Application pending·0 cites
- 1343US2017268711A1Branching structureTOSHIBA KK·Filed 2017·Application pending·0 cites
- 1442US10844485B2Flow passage structure and processing apparatusTOSHIBA KK·Filed 2017·Granted Nov 24, 2020·0 cites·16 claims
- 1538US10870913B2Processing device, sputtering device, and collimatorTOSHIBA KK·Filed 2016·Granted Dec 22, 2020·0 cites·15 claims
- 1636US9550273B2Polishing device and method of polishing semiconductor waferTOSHIBA KK·Filed 2015·Granted Jan 24, 2017·0 cites·15 claims
- 1735US2018258532A1Shower plate, processing apparatus, and ejection methodTOSHIBA KK·Filed 2018·Application pending·0 cites
- 1835US2018233336A1Processing apparatus and collimatorTOSHIBA KK·Filed 2016·Application pending·0 cites
- 1934US2018067330A1Processing device and collimatorTOSHIBA KK·Filed 2016·Application pending·0 cites
- 2034US2018233335A1Processing device and collimatorTOSHIBA KK·Filed 2016·Application pending·0 cites
- 2131US2018272371A1Nozzle and liquid supply deviceTOSHIBA KK·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →