Nozzle device and processing apparatus

Abstract

A nozzle device according to an embodiment includes a first opening, a plurality of second openings, and a first duct part. The first duct part includes at least one first branching part having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction. The first duct part connects the first opening and the second openings and is branched at least once by the first branching part in a path extending from the first opening to the second openings. The path lengths and the numbers of first branching parts between the first opening and the respective second openings are the same. The cross-sectional area of the first end of the first part is smaller than the cross-sectional area of a second end of the first part.

1 . A nozzle device comprising:
 a first opening;   a plurality of second openings; and   a first duct part including first branching parts each having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction, the first duct part connecting the first opening and the second openings, branched at least once by the first branching parts in a path from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings, wherein   the second parts extend in directions intersecting with the first direction at an angle of smaller than 90 degrees.   
     
     
         2 . The nozzle device according to  claim 1 , wherein the cross-sectional shape of the first part has a length in the direction in which the second part of the other first branching part orthogonal to the first part extends in a planar view in the direction in which the first part extends smaller than a length thereof in a second direction orthogonal both to the first direction and to the direction in which the second part extends. 
     
     
         3 . The nozzle device according to  claim 1 , further comprising:
 a third opening;   a plurality of fourth openings; and   a second duct part including second branching parts each having a third part extending in the first direction and a plurality of fourth parts connected to a first end of the third part and extending in respective directions intersecting with the first direction, the second duct part connecting the third opening and the fourth openings, branched at least once by the second branching parts in a path from the third opening to the fourth openings, and having the same path length and the same number of second branching parts between the third opening and the fourth openings, wherein   the first duct part further includes a first nozzle parts that connects the second parts of the first branching parts closest to the second openings to the respective second openings in the path extending from the first opening to the second openings,   the second duct part further includes a second nozzle parts that connects the fourth parts of the second branching parts closest to the fourth openings to the respective fourth openings in the path extending from the third opening to the fourth openings and that is connected to the first nozzle parts in an intersecting manner,   the first nozzle parts has a first small-diameter parts provided at a position closer to the first opening than a part connected to the second nozzle parts in the path extending from the first opening to the second openings and having a smaller cross-sectional area in the first nozzle parts, and   the second nozzle parts has a second small-diameter parts provided at a position closer to the third opening than a part connected to the first nozzle parts in the path extending from the third opening to the fourth openings and having a smaller cross-sectional area in the second nozzle parts.   
     
     
         4 . A processing apparatus comprising:
 the nozzle device according to  claim 1 ;   an accommodating unit configured to accommodate a fluid; and   a supply unit configured to supply the fluid in the accommodating unit to the first opening.   
     
     
         5 . A nozzle device comprising:
 a first opening;   a plurality of second openings; and   a first duct part including first branching parts each having a first part extending in a first direction, a plurality of second parts extending in respective directions intersecting with the first direction, a connecting part that connects a first end of the first part and the second parts, and a division part provided to the connecting part at a position facing the first end of the first part and recessed with respect to the first end, the first duct part connecting the first opening and the second openings, branched at least once by the first branching parts in a path from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings.   
     
     
         6 . The nozzle device according to  claim 5 , wherein the cross-sectional shape of the first part has a length in the direction in which the second part of the other first branching part orthogonal to the first part extends in a planar view in the direction in which the first part extends smaller than a length thereof in a second direction orthogonal both to the first direction and to the direction in which the second part extends. 
     
     
         7 . The nozzle device according to  claim 5 , further comprising:
 a third opening;   a plurality of fourth openings; and   a second duct part including second branching parts each having a third part extending in the first direction and a plurality of fourth parts connected to a first end of the third part and extending in respective directions intersecting with the first direction, the second duct part connecting the third opening and the fourth openings, branched at least once by the second branching parts in a path from the third opening to the fourth openings, and having the same path length and the same number of second branching parts between the third opening and the fourth openings, wherein   the first duct part further includes a first nozzle parts that connects the second parts of the first branching parts closest to the second openings to the respective second openings in the path extending from the first opening to the second openings,   the second duct part further includes a second nozzle parts that connects the fourth parts of the second branching parts closest to the fourth openings to the respective fourth openings in the path extending from the third opening to the fourth openings and that is connected to the first nozzle parts in an intersecting manner,   the first nozzle parts has a first small-diameter parts provided at a position closer to the first opening than a part connected to the second nozzle parts in the path extending from the first opening to the second openings and having a smaller cross-sectional area in the first nozzle parts, and   the second nozzle parts has a second small-diameter parts provided at a position closer to the third opening than a part connected to the first nozzle parts in the path extending from the third opening to the fourth openings and having a smaller cross-sectional area in the second nozzle parts.   
     
     
         8 . A processing apparatus comprising:
 the nozzle device according to  claim 5 ;   an accommodating unit configured to accommodate a fluid; and   a supply unit configured to supply the fluid in the accommodating unit to the first opening.