Inventor · disambiguated record
Shusei Kato
Also filed as: KATO SHUSEI
2 granted patents·4 pending applications·0 citations·filing 2022–2025
24Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0170US2025364226A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0260US12412735B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Sep 9, 2025·0 cites·19 claims
- 0356US12308221B2Substrate processing system and method for installing edge ringTOKYO ELECTRON LTD·Filed 2024·Granted May 20, 2025·0 cites·16 claims
- 0456US2025104979A1Substrate processing systemTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0549US2025226189A1Substrate treatment systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0648US2025279264A1Substrate processing system and transfer methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →