Inventor · disambiguated record

Shingo Katsuki

Also filed as: KATSUKI SHINGO

3 granted patents·55 citations·filing 2008–2017

72Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0190US7934880B2Coating and developing apparatus, coating and developing method, and storage mediumTOKYO ELECTRON LTD·Filed 2009·Granted May 3, 2011·26 cites·18 claims
0290US7645081B2Coating and developing apparatus, coating and developing method, and storage mediumTOKYO ELECTRON LTD·Filed 2008·Granted Jan 12, 2010·25 cites·21 claims
0381US10424502B2Substrate transfer device and bonding systemTOKYO ELECTRON LTD·Filed 2017·Granted Sep 24, 2019·4 cites·7 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →