Inventor · disambiguated record

Shu Kino

Also filed as: KINO SHU

3 granted patents·1 pending application·0 citations·filing 2020–2021

44Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD4

Top patents by PatentIndex Score

4 records

0161US11881410B2Substrate processing apparatus and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jan 23, 2024·0 cites·14 claims
0256US11201063B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 14, 2021·0 cites·18 claims
0355US12347645B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 1, 2025·0 cites·18 claims
0439US2022122813A1Substrate processing system, control method, and control programTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →