Inventor · disambiguated record
Shingo Koiwa
Also filed as: KOIWA SHINGO
7 granted patents·6 pending applications·8 citations·filing 2013–2022
74Inventor score
Files withTOKYO ELECTRON LTD13
Top patents by PatentIndex Score
13 records- 0176US9613837B2Substrate processing apparatus and maintenance method thereofTOKYO ELECTRON LTD·Filed 2013·Granted Apr 4, 2017·4 cites·17 claims
- 0273US10515786B2Mounting table and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Dec 24, 2019·2 cites·16 claims
- 0366US9831112B2Substrate processing apparatus and substrate detaching methodTOKYO ELECTRON LTD·Filed 2014·Granted Nov 28, 2017·2 cites·9 claims
- 0455US12451336B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2022·Granted Oct 21, 2025·0 cites·22 claims
- 0552US2023136720A1Substrate support, plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0651US2023163012A1Substrate support and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0749US2022415629A1Substrate support, substrate support assembly, and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0848US11521837B2Stage and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Dec 6, 2022·0 cites·18 claims
- 0948US2023073711A1Substrate support assembly and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 1045US11798791B2Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Oct 24, 2023·0 cites·16 claims
- 1145US2021391152A1Stage, substrate processing apparatus, and substrate processing methodTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1244US2022301914A1Electrostatic chuck for a plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Application pending·0 cites
- 1338US10665491B2Processing apparatus for thermally processing a workpiece in a chamberTOKYO ELECTRON LTD·Filed 2017·Granted May 26, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →