Inventor · disambiguated record
Shunichiro Kojima
Also filed as: KOJIMA SHUNICHIRO
14 granted patents·396 citations·filing 1997–2008
94Inventor score
Top patents by PatentIndex Score
14 records- 0193US6435949B1Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereofEBARA CORP·Filed 2000·Granted Aug 20, 2002·71 cites·8 claims
- 0292US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 0391US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 0490US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 0586US6899592B1Polishing apparatus and dressing method for polishing toolEBARA CORP·Filed 2003·Granted May 31, 2005·72 cites·14 claims
- 0682US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 0782US6050884APolishing apparatusEBARA CORP·Filed 1997·Granted Apr 18, 2000·57 cites·13 claims
- 0877US5934984APolishing apparatusEBARA CORP·Filed 1997·Granted Aug 10, 1999·36 cites·30 claims
- 0976US6899604B2Dressing apparatus and polishing apparatusEBARA CORP·Filed 2002·Granted May 31, 2005·17 cites·14 claims
- 1073US6409582B1Polishing apparatusEBARA CORP·Filed 2000·Granted Jun 25, 2002·14 cites·6 claims
- 1160US7156725B2Substrate polishing machineEBARA CORP·Filed 2002·Granted Jan 2, 2007·7 cites·5 claims
- 1259US6790129B2Method for polishing angular substratesSHINETSU CHEMICAL CO·Filed 2002·Granted Sep 14, 2004·7 cites·13 claims
- 1357US6293858B1Polishing deviceEBARA CORP·Filed 1999·Granted Sep 25, 2001·21 cites·20 claims
- 1456US6241592B1Polishing apparatusEBARA CORP·Filed 1999·Granted Jun 5, 2001·15 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →