Inventor · disambiguated record
Shu Kusano
Also filed as: KUSANO SHU
7 granted patents·2 pending applications·6 citations·filing 2014–2023
75Inventor score
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0189US11705313B2Inspection method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Jul 18, 2023·2 cites·9 claims
- 0281US11183374B2Wastage determination method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Nov 23, 2021·1 cites·16 claims
- 0375US9978566B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2016·Granted May 22, 2018·2 cites·6 claims
- 0474US11133157B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Sep 28, 2021·1 cites·14 claims
- 0554US10763089B2Wastage determination method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Sep 1, 2020·0 cites·17 claims
- 0654US2024212996A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0753US2015072534A1Etching method of multilayer filmTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0852US8895454B2Etching method of multilayer filmTOKYO ELECTRON LTD·Filed 2014·Granted Nov 25, 2014·0 cites·7 claims
- 0950US10297428B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 21, 2019·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →