Inventor · disambiguated record
Shanker Kuttath
Also filed as: KUTTATH SHANKER
3 granted patents·4 pending applications·2 citations·filing 2022–2024
54Inventor score
Files withASM IP HOLDING BV7
Top patents by PatentIndex Score
7 records- 0188US11996312B2Electrostatic chuckASM IP HOLDING BV·Filed 2022·Granted May 28, 2024·2 cites·20 claims
- 0278US12451386B2Electrostatic chuckASM IP HOLDING BV·Filed 2024·Granted Oct 21, 2025·0 cites·20 claims
- 0353US2023013637A1Substrate support structures and methods of making substrate support structuresASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0452US12062565B2Electrostatic chuck, assembly including the electrostatic chuck, and method of controlling temperature of the electrostatic chuckASM IP HOLDING BV·Filed 2022·Granted Aug 13, 2024·0 cites·19 claims
- 0550US2023389134A1Methods of making heating blocks, heating blocks, and semiconductor processing systems having heating blocksASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0649US2023245905A1Multi-zone laminate heater plateASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 0749US2023411198A1Article with a protective coatingASM IP HOLDING BV·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →