Inventor · disambiguated record
Shao Beng Law
Also filed as: LAW SHAO BENG
19 granted patents·2 pending applications·148 citations·filing 2006–2019
93Inventor score
Top patents by PatentIndex Score
21 records- 0197US10026687B1Metal interconnects for super (skip) via integrationGLOBALFOUNDRIES INC·Filed 2017·Granted Jul 17, 2018·20 cites·8 claims
- 0297US9805972B1Skip via structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Oct 31, 2017·36 cites·20 claims
- 0395US9905424B1Self-aligned non-mandrel cut formation for tone inversionGLOBALFOUNDRIES INC·Filed 2017·Granted Feb 27, 2018·16 cites·20 claims
- 0492US10395926B1Multiple patterning with mandrel cuts formed using a block maskGLOBALFOUNDRIES INC·Filed 2018·Granted Aug 27, 2019·11 cites·20 claims
- 0592US10014297B1Methods of forming integrated circuit structure using extreme ultraviolet photolithography technique and related integrated circuit structureGLOBALFOUNDRIES INC·Filed 2017·Granted Jul 3, 2018·9 cites·20 claims
- 0690US10109526B1Etch profile control during skip via formationGLOBALFOUNDRIES INC·Filed 2017·Granted Oct 23, 2018·9 cites·18 claims
- 0790US8177993B2Apparatus and methods for cleaning and drying of wafersSEAH BOON MENG·Filed 2006·Granted May 15, 2012·28 cites·14 claims
- 0889US9966338B1Pre-spacer self-aligned cut formationGLOBALFOUNDRIES INC·Filed 2017·Granted May 8, 2018·5 cites·18 claims
- 0984US10573593B2Metal interconnects for super (skip) via integrationGLOBALFOUNDRIES INC·Filed 2018·Granted Feb 25, 2020·3 cites·12 claims
- 1083US10163633B2Non-mandrel cut formationGLOBALFOUNDRIES INC·Filed 2017·Granted Dec 25, 2018·3 cites·19 claims
- 1182US10770392B1Line end structures for semiconductor devicesGLOBALFOUNDRIES INC·Filed 2019·Granted Sep 8, 2020·3 cites·20 claims
- 1274US10485111B2Via and skip via structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Nov 19, 2019·2 cites·16 claims
- 1371US10236256B2Pre-spacer self-aligned cut formationGLOBALFOUNDRIES INC·Filed 2018·Granted Mar 19, 2019·1 cites·9 claims
- 1469US10199261B1Via and skip via structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Feb 5, 2019·1 cites·20 claims
- 1566US10056291B2Post spacer self-aligned cutsGLOBALFOUNDRIES INC·Filed 2016·Granted Aug 21, 2018·1 cites·19 claims
- 1652US10627720B2Overlay mark structuresGLOBALFOUNDRIES INC·Filed 2017·Granted Apr 21, 2020·0 cites·13 claims
- 1750US10636656B2Methods of protecting structure of integrated circuit from reworkGLOBALFOUNDRIES INC·Filed 2018·Granted Apr 28, 2020·0 cites·20 claims
- 1846US10056292B2Self-aligned lithographic patterningGLOBALFOUNDRIES INC·Filed 2016·Granted Aug 21, 2018·0 cites·20 claims
- 1944US2012255586A1Apparatus and methods for cleaning and drying of wafersSEAH BOON MENG·Filed 2012·Application pending·0 cites
- 2040US2019206718A1Back-end-of-line structures with air gapsGLOBALFOUNDRIES INC·Filed 2018·Application pending·0 cites
- 2134US10741495B2Structure and method to reduce shorts and contact resistance in semiconductor devicesGLOBALFOUNDRIES INC·Filed 2018·Granted Aug 11, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →