Inventor · disambiguated record

Shaoyu Lu

Also filed as: LU SHAOYU

2 granted patents·9 citations·filing 2016–2018

48Inventor score

Technology areasG06T

Files withKLA TENCOR CORP2

Top patents by PatentIndex Score

2 records

0187US10789703B2Semi-supervised anomaly detection in scanning electron microscope imagesKLA TENCOR CORP·Filed 2018·Granted Sep 29, 2020·9 cites·20 claims
0240US10074167B2Reducing registration and design vicinity induced noise for intra-die inspectionKLA TENCOR CORP·Filed 2016·Granted Sep 11, 2018·0 cites·18 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →