Inventor · disambiguated record
Shigemi Murakawa
Also filed as: MURAKAWA SHIGEMI
11 granted patents·9 pending applications·391 citations·filing 1985–2015
92Inventor score
Top patents by PatentIndex Score
20 records- 0196US6399520B1Semiconductor manufacturing method and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·175 cites·13 claims
- 0290US10480073B2Rotating semi-batch ALD deviceMURAKAWA SHIGEMI·Filed 2015·Granted Nov 19, 2019·9 cites·19 claims
- 0389US5518572APlasma processing system and methodKAWASAKI STEEL CO·Filed 1995·Granted May 21, 1996·126 cites·13 claims
- 0486US6897149B2Method of producing electronic device materialTOKYO ELECTRON LTD·Filed 2002·Granted May 24, 2005·24 cites·34 claims
- 0585US7217659B2Process for producing materials for electronic deviceTOKYO ELECTRON LTD·Filed 2005·Granted May 15, 2007·5 cites·44 claims
- 0683US6470824B2Semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Oct 29, 2002·26 cites·3 claims
- 0774US8573151B2Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric windowOHMI TADAHIRO·Filed 2009·Granted Nov 5, 2013·3 cites·18 claims
- 0873US7374635B2Forming method and forming system for insulation filmTOKYO ELECTRON LTD·Filed 2006·Granted May 20, 2008·3 cites·9 claims
- 0963US2007218687A1Process for producing materials for electronic deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1057US2010098851A1Techniques for atomic layer depositionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
- 1154US2008214017A1Forming Method and Forming System for Insulation FilmTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1252US2007224837A1Method for producing material of electronic deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1351US7166185B2Forming system for insulation filmTOKYO ELECTRON LTD·Filed 2002·Granted Jan 23, 2007·2 cites·26 claims
- 1449US2010029038A1Manufacturing method of solar cell and manufacturing apparatus of solar cellTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1549US2005233599A1Method for producing material of electronic deviceMAKOTO ANDO·Filed 2005·Application pending·0 cites
- 1646US4697453AApparatus for monitoring burden distribution in furnaceKAWASAKI STEEL CO·Filed 1985·Granted Oct 6, 1987·12 cites·30 claims
- 1740US2004142577A1Method for producing material of electronic deviceFiled 2002·Application pending·0 cites
- 1837US2004241968A1Production method and production device for semiconductor deviceFiled 2002·Application pending·0 cites
- 1936US2005003660A1Semiconductor device and production method thereforFiled 2002·Application pending·0 cites
- 2035US4914948AApparatus for monitoring burden distribution in furnaceKAWASAKI STEEL CO·Filed 1988·Granted Apr 10, 1990·6 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →