Inventor · disambiguated record
Shuo Na
Also filed as: NA SHUO · NA Shuo Julia
5 granted patents·2 pending applications·2 citations·filing 2013–2016
62Inventor score
Files withAPPLIED MATERIALS INC7
Top patents by PatentIndex Score
7 records- 0176US10309013B2Method and system for identifying a clean endpoint time for a chamberAPPLIED MATERIALS INC·Filed 2014·Granted Jun 4, 2019·2 cites·14 claims
- 0249US9653269B2Detecting arcing using processing chamber dataAPPLIED MATERIALS INC·Filed 2014·Granted May 16, 2017·0 cites·23 claims
- 0341US10002748B2Detection of grounding strap breakageAPPLIED MATERIALS INC·Filed 2015·Granted Jun 19, 2018·0 cites·20 claims
- 0435US10269601B2Chamber leak and gas contaimination detectionAPPLIED MATERIALS INC·Filed 2016·Granted Apr 23, 2019·0 cites·16 claims
- 0534US9704762B2Application of in-line glass edge-inspection and alignment check in display manufacturingAPPLIED MATERIALS INC·Filed 2015·Granted Jul 11, 2017·0 cites·5 claims
- 0632US2015147830A1Detection of substrate defects by tracking processing parametersAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0728US2015219565A1Application of in-line thickness metrology and chamber matching in display manufacturingAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →